New PDF release: Characterization in Silicon Processing (Materials

By Yale E. Strausser

With a spotlight at the use of fabrics characterization recommendations for silicon-based semiconductors, this quantity within the fabrics Characterization sequence specializes in the method move of silicon wafer manufacture the place fabrics houses, processing and linked difficulties are dropped at the fore. The e-book is geared up by way of the kinds of fabrics more often than not linked to built-in silicon semiconductor circuits and the common approaches concerned for every such fabric, together with deposition, thermal remedy, and lithography. Readers will locate beneficial properties corresponding to: -- the basic strategies of Silicon Epitaxial development -- insurance of Polysilicon Conductors, Silicides, Aluminum- and Copper-based Conductors, Tungsten-based Conductors -- Concise summaries of significant characterization applied sciences for silicon and comparable semiconductor fabrics, together with Auger Electron Spectroscopy, Energy-Dispersive X-Ray Spectroscopy, Neutron Activation research and Raman Spectroscopy

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Characterization in Silicon Processing (Materials Characterization) by Yale E. Strausser


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