By Emmanuel Defaÿ
After detailing the fundamental thermodynamic concept utilized to high-K dielectrics skinny movies together with extrinsic results, this ebook emphasizes the specificity of skinny movies. Deposition and patterning applied sciences are then offered. a complete bankruptcy is devoted to the most important position performed within the box by means of X-Ray Diffraction characterization, and different characterization innovations also are defined reminiscent of Radio frequency characterization. An in-depth examine of the impact of leakage currents is played including reliability dialogue. 3 applicative chapters disguise built-in capacitors, variables capacitors and ferroelectric thoughts. the ultimate bankruptcy offers with a pretty new study box, multiferroic skinny films.
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Ferroelectric Dielectrics Integrated on Silicon by Emmanuel Defaÿ
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